Title:
SUBSTRATE COATED WITH BORON NITRIDE-CONTAINING FILM AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3491288
Kind Code:
B2
Abstract:
PURPOSE: To obtain a coated substrate having high hardness and excellent in sliding property by changing the crystal structure of a boron nitride-contg. film toward the surface at the time of laminating a group VIa element-contg. film and a boron nitride-contg. film on a substrate.
CONSTITUTION: A group VIa element-contg. film 2 is formed on a substrate 1 through a mixed layer 4 contg. the substrate and a group VIa element, and a boron nitride-contg. film 3 is formed on the film 2 through a mixed layer 5 contg. the group Vla element and boron nitride. At this time, the crystal structure of the film 3 is successively changed from the substrate 1 surface toward the film 3 surface, namely from a cubic zinc blade (c-BN) or hexagonal wurtzite (w-BN) crystal structure to the mixture of one of the crystal structures and the crystal structure (h-BN) similar to hexagonal graphite. Thus, a substrate coated with a boron nitride film having high hardness and excellent in sliding property is obtained.
Inventors:
Akira Nishiyama
Akinori Ebe
Naoto Kuratani
Kiyoshi Ogata
Akinori Ebe
Naoto Kuratani
Kiyoshi Ogata
Application Number:
JP36093A
Publication Date:
January 26, 2004
Filing Date:
January 05, 1993
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
C01B21/064; C23C14/06; C23C14/22; C23C14/24; C23C14/34; C23C14/48; C23C16/30; (IPC1-7): C23C14/06; C01B21/064; C23C14/48
Domestic Patent References:
| JP62164869A |
Attorney, Agent or Firm:
Shintaro Nogawa
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