To provide a substrate transporting and keeping container, such as the clean box, substrate container for automatic transportation, substrate stocking shelf, etc., which is maintenance free and compact, consumes little electric power, and is loaded with a dehumidifier unit that can control an attained humidity.
The substrate transporting and keeping container is provided with a main body 1 having an opening used at the time of housing substrates in the main body 1 and a lid body which covers the opening in a hermetically sealable state, a fan motor 6 which forms the circulating flow passage of an air current that comes into contact with the substrates in the main body 1, and a particle removing filter 7 and a gaseous impurity catching filter 8 which are arranged in the flow passage of the air current flowing toward the substrates. The container is also provided with a dehumidifying means 10 composed of a solid macromolecular electrolytic film arranged in the flow passage of a circulated air current and a voltage supplying means which supplies a voltage to the electrolytic film so that the film may dehumidify the circulating flow by decomposing the moisture in the air current.
TANAKA AKIRA
OKUBO KAZUO
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