Title:
SUBSTRATE COOLING APPARATUS IN VACUUM EVAPORATION MACHINE, ETC.
Document Type and Number:
Japanese Patent JPS5260279
Kind Code:
A
Abstract:
PURPOSE: To rapidly and uniformly cool a substrate of a vacuum evaporation machine, etc. in order to make the machine, etc. shorter.
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Inventors:
OKAMOTO EIKI
IDA YOSHIKANE
FUJIMOTO SATORU
IDA YOSHIKANE
FUJIMOTO SATORU
Application Number:
JP13683175A
Publication Date:
May 18, 1977
Filing Date:
November 13, 1975
Export Citation:
Assignee:
SHARP KK
International Classes:
F25D9/00; C23C14/50; C23C14/54; G12B15/02; (IPC1-7): C23C13/08; F25D3/10