Title:
基板検出装置、基板検出方法、及び基板処理ユニット
Document Type and Number:
Japanese Patent JP7433644
Kind Code:
B2
Abstract:
To easily acquire substrate information by enabling the detection of the substrate even in either case where the shape of a storage container is not standardized or a case where the shape of the substrate is a rectangular substrate.SOLUTION: A substrate detection device includes: a placement part for placing a storage container in which a plurality of substrates are vertically arranged and stored; a sensor holding part which relatively moves up and down with respect to the placement part; a lifting/lowering drive part for relatively lifting and lowering the placement part and the sensor holding part; a plurality of sensors arranged in the sensor holding part separately in a direction crossing a vertical direction to respectively detect different parts of edge parts of the substrates stored in the storage container; and a control part for acquiring substrate information in the storage container from detection results of the edge parts of the substrates by the plurality of sensors while relatively lifting and lowering the placement part and the sensor holding part by driving the lifting/lowering drive part.SELECTED DRAWING: Figure 1
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Inventors:
Yoshihiro Inao
Takeshi Izumi
Takeshi Izumi
Application Number:
JP2020098471A
Publication Date:
February 20, 2024
Filing Date:
June 05, 2020
Export Citation:
Assignee:
AI Mecha Tech Co., Ltd.
International Classes:
H01L21/67
Domestic Patent References:
| JP2003282675A | ||||
| JP2002164411A | ||||
| JP201369965A | ||||
| JP200392339A | ||||
| JP2006294642A | ||||
| JP2000294617A | ||||
| JP922452A |
Foreign References:
| US6013920 | ||||
| US6452201 |
Attorney, Agent or Firm:
Kazuya Nishi
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