Title:
基板及び膜基板生産方法
Document Type and Number:
Japanese Patent JP6829851
Kind Code:
B2
Abstract:
Proposed is a method for producing a film substrate, by which a film substrate is produced by forming a film on a substrate, said film being capable of operating at high temperatures, by mixing a powder of a ferroelectric body and a sol-gel solution of a dielectric body with each other. According to the present invention, a film substrate is produced by forming a film on a substrate using a mixture of a powder and a sol-gel solution. The powder is composed of CaBi2Ta2O9. The mixture of a powder and a sol-gel solution is a mixture of a CaBi4Ti4O15 powder and a sol-gel solution of Bi4Ti3O12 and/or (Ba, Sr)TiO3. Consequently, a high sound wave transducer or a pressure sensitive sensor, which operates properly at 700°C and even at extremely high temperatures exceeding 800°C, is able to be produced. In addition, according to the present invention, polarization is able to be performed at, for example, 400°C or even around room temperature.
Inventors:
Makiko Kobayashi
Nakatsuma Kei
Masayuki Tanabe
Nakatsuma Kei
Masayuki Tanabe
Application Number:
JP2019523394A
Publication Date:
February 17, 2021
Filing Date:
April 25, 2018
Export Citation:
Assignee:
Kumamoto University
International Classes:
H01L41/318; H01L21/316; H01L41/113; H01L41/187; H01L41/257; H04R17/00; H04R31/00
Domestic Patent References:
| JP2012244369A | ||||
| JP2004319995A | ||||
| JP2007329460A |
Other References:
KIBE, Taiga et al.,Continuous Monitoring at 600°C by CaBi4Ti4O15/Pb(Zr,Ti)O3 Sol-gel Composite Ultrasonic Transducer,2016 IEEE International Ultrasonics Symposium (IUS),2016年11月 3日,
YAMAMOTO, Tomoya et al.,High Tempareture Ultrasonic Transducers by CaBi2TaO9/Pb(Zr,Ti)O3 Sol-gel Composite,2017 IEEE International Ultrasonics Symposium (IUS),2017年11月 2日,
YAMAMOTO, Tomoya et al.,High Tempareture Ultrasonic Transducers by CaBi2TaO9/Pb(Zr,Ti)O3 Sol-gel Composite,2017 IEEE International Ultrasonics Symposium (IUS),2017年11月 2日,
Attorney, Agent or Firm:
Shoji Hadachi