Title:
磁気流体による基板研磨仕上げシステム
Document Type and Number:
Japanese Patent JP5623437
Kind Code:
B2
Abstract:
A system for magnetorheological finishing of a substrate. A spherical wheel meant for carrying a magnetorheological finishing fluid houses a variable-field permanent magnet system having north and south iron pole pieces separated by primary and secondary gaps with a cylindrical cavity bored through the center. A cylindrical permanent magnet magnetized normal to the cylinder axis is rotatably disposed in the cavity. An actuator allows rotation of the permanent magnet to any angle, which rotation changes the distribution of flux in the magnetic circuit through the pole pieces. Thus, one can control field intensity in the gaps by positioning the permanent magnet at whatever angle provides the required field strength. Because the field also passes above the pole pieces, defining a fringing field outside the wheel surface, the variable field extends through a layer of MR fluid on the wheel, thus varying the stiffness of the MR fluid as may be desired for finishing control.
Inventors:
コルドンスキ，ウィリアム
Application Number:
JP2011553043A
Publication Date:
November 12, 2014
Filing Date:
March 02, 2010
Export Citation:
Assignee:
キューイーディー・テクノロジーズ・インターナショナル・インコーポレーテッド
International Classes:
B24B37/00; B24B31/112
Attorney, Agent or Firm:
Mitsuru Kimura
Takanori Menju
Taiji Morikawa
Yasuhito Amemiya
Kei Sakurada
Mie Hideki
Takanori Menju
Taiji Morikawa
Yasuhito Amemiya
Kei Sakurada
Mie Hideki