Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSPORT DEVICE
Document Type and Number:
Japanese Patent JP2020205450
Kind Code:
A
Abstract:
To provide an arm rotation mechanism of a substrate transfer robot that can be operated independently.SOLUTION: In a substrate processing apparatus, a first arm 12 having a first upper arm, a first forearm, and at least one substrate holder continuously and rotatably coupled to each other, and a second upper arm having a second upper arm 14, a second forearm, and at least one substrate holder continuously and rotatably coupled to each other are coupled to a frame at a shoulder axis such that the rotation axes coincide, and the first and second arms extend and rotate independently. At each angular position of the first arm 12, the extension axis of the first arm 12 includes a drive section having an angle with respect to the extension axis of the second arm 14 within a predetermined angular range, and at each angular position of the second arm 14. The angular limit of the predetermined angular range is defined independently of the operation of the drive section.SELECTED DRAWING: Figure 1
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Inventors:
ROBERT T CAVENEY
ALEXANDER KRUPYSHEV
ELLIOTT R MARTIN
CHRISTOPHER HOFMEISTER
ALEXANDER KRUPYSHEV
ELLIOTT R MARTIN
CHRISTOPHER HOFMEISTER
Application Number:
JP2020155790A
Publication Date:
December 24, 2020
Filing Date:
September 16, 2020
Export Citation:
Assignee:
BROOKS AUTOMATION INC
International Classes:
H01L21/677; B25J9/06
Domestic Patent References:
| JP2005019960A | 2005-01-20 |
Attorney, Agent or Firm:
Asahina Patent Office