Title:
Board processing equipment
Document Type and Number:
Japanese Patent JP6359377
Kind Code:
B2
Inventors:
Motoyuki Shimai
Mitsuharu Hashimoto
Mitsuharu Hashimoto
Application Number:
JP2014162194A
Publication Date:
July 18, 2018
Filing Date:
August 08, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2014067780A | ||||
| JP2005049765A | ||||
| JP2013157353A |
Attorney, Agent or Firm:
Masahiro Matsusaka
Tsutomu Tanaka
Masamichi Ida
Tsutomu Tanaka
Masamichi Ida
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