Title:
基板処理方法
Document Type and Number:
Japanese Patent JP4025096
Kind Code:
B2
Abstract:
A dehydration drying method dehydrates and dries a substrate. The substrate ( 15 ) is dehydrated and dried without being rotated while the substrate ( 15 ) is accommodated in a carrier ( 10 ) operable to carry the substrate ( 15 ) between apparatuses for carrying out certain processes.
Inventors:
Koji Ato
Tetsuji Togawa
Tetsuji Togawa
Application Number:
JP2002063244A
Publication Date:
December 19, 2007
Filing Date:
March 08, 2002
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B65D85/86; F26B5/04; H01L21/304; F26B5/08; F26B25/06; H01L21/00; H01L21/306; H01L21/3105; H01L21/316
Domestic Patent References:
| JP4048731A | ||||
| JP9148297A | ||||
| JP2000223467A | ||||
| JP2000164555A |
Attorney, Agent or Firm:
Takashi Kumagai
Yu Takagi
Yu Takagi