Title:
基板処理システム、基板処理方法、および制御プログラム
Document Type and Number:
Japanese Patent JP7109287
Kind Code:
B2
Abstract:
A substrate processing system includes a processing unit including processing modules and a first transfer device, a loading/unloading unit including a load port holding a substrate accommodating container and a second transfer device, and a control unit. The control unit controls the substrates to be sequentially transferred. When an error has occurred in a certain processing module, the control unit executes: collecting a substrate that has been unloaded from the substrate accommodating container but has not been processed in the substrate accommodating container; continuing processing of a preceding substrate in a processing module sequentially following the processing module in which the error has occurred; retreating an error substrate processed in the process module in which the error has occurred from the processing module to a retreat position; and continuing processing of a subsequent substrate processed in a processing module sequentially preceding the processing module in which the error has occurred.
Inventors:
Shunji Hirata
Yosuke Katada
Takafumi Matsuhashi
Kunio Takano
Koichi Nakajima
Yosuke Katada
Takafumi Matsuhashi
Kunio Takano
Koichi Nakajima
Application Number:
JP2018130079A
Publication Date:
July 29, 2022
Filing Date:
July 09, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677
Domestic Patent References:
| JP2006203003A | ||||
| JP2006203145A |
Foreign References:
| WO2011102274A1 |
Attorney, Agent or Firm:
Hiroshi Takayama
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