SUBSTRATE PROCESSOR - HITACHI INT ELECTRIC INC

Title:

SUBSTRATE PROCESSOR

Document Type and Number:

Japanese Patent JP2006092298

Kind Code:

A

Abstract:

To improve automatic production efficiency and to shorten recovery processing in the event of failure.

This processor comprises a first control means (main control part 12) and a second control means 11. The main control part 12 controls a subunit 13 of a device body and logs a first communication telegram transmitted and received between the main control part 12 and the subunit 13. The second control means 11 is interposed between the main control part 12 and a host computer 10 and logs a second communication telegram transmitted and received between the host computer 10 and the main control part 12. The second control means 11 receives the first communication telegram logged by the main control part 12, thereby displaying, on a display 11b, the input and output state among the host computer 10, the second control means 11, the main control part and the subunit 12 with the input and output state of the second communication telegram logged by the second control means 11.

Inventors:

FUKUDA MITSURU

Application Number:

JP2004277459A

Publication Date:

April 06, 2006

Filing Date:

September 24, 2004

Export Citation:

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Assignee:

HITACHI INT ELECTRIC INC

International Classes:

G05B19/418; C23C16/52; G05B23/02; H01L21/02; H01L21/205; H01L21/22; H01L21/31; H01L21/324

Attorney, Agent or Firm:

Toru Yui
Aniya Setsuo
Hitoshi Kiyono

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