Title:
基板吸着固定ステージ及びボール搭載装置
Document Type and Number:
Japanese Patent JP7109076
Kind Code:
B2
Abstract:
To provide a stable ball mounting that prevents warpage and deformation of a ball array mask without excess or shortage, and a substrate adsorption fixed stage that does not require a large driving stroke for separating a plate.SOLUTION: A substrate adsorption fixed stage includes a first plate 52 having a vacuum suction hole 55 for sucking a substrate 14, and in which a plurality of magnetic portions A and B are alternately arranged and fixed with a gap in one plane direction, a second plate 53 that is disposed on the side opposite to a ball arranging mask 11 of the first plate 52, and in which each of the plurality of magnetic portions C is arranged and fixed at a position facing each of the plurality of magnetic portions A on a flat plate magnet 57, and an actuator 60 that moves the second plate 53 in parallel with first plate 52 to a position where the magnetic portion C overlaps the magnetic portion A, and a position where the magnetic portion C is separated from the magnetic portion A in the plane direction and is close to the magnetic portion B.SELECTED DRAWING: Figure 3
Inventors:
Tanikai Tadashi
Aya Sendo
Masahiko Sendo
Aya Sendo
Masahiko Sendo
Application Number:
JP2018181042A
Publication Date:
July 29, 2022
Filing Date:
September 26, 2018
Export Citation:
Assignee:
Athlete fa corporation
International Classes:
H01L21/60; H05K3/34
Domestic Patent References:
| JP2005101502A | ||||
| JP2008288515A | ||||
| JP2008177264A | ||||
| JP2016007584A | ||||
| JP2014179424A | ||||
| JP2006054341A |
Attorney, Agent or Firm:
Mebuki International Patent Business Corporation
Seigo Matsuo
Seigo Matsuo