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Title:
SUBSTRATE SUCTION UNIT AND SUBSTRATE SUCTION ASSEMBLY
Document Type and Number:
Japanese Patent JP2011093707
Kind Code:
A
Abstract:

To provide a substrate suction unit and a substrate suction assembly for sucking a plurality of substrates.

In the substrate suction unit and the substrate suction assembly for sucking a plurality of substrates, the substrate suction assembly includes a fixed frame and a plurality of substrate suction units. Each substrate suction unit is fixed on the fixed frame corresponding to each substrate with a spacing therebetween. Each substrate suction unit is pneumatically connected to a vacuum apparatus, and includes a body and suction units. The body is pneumatically connected to the vacuum apparatus, the suction units are symmetrically provided on terminals of the body, and pneumatically connected to the vacuum apparatus via the body, and has a plurality of suction members to be used for uniformly sucking any one of the substrates.


Inventors:
CHEN JUIHSI
SUN LIHSHIUAN
TSENG SHIH MING
Application Number:
JP2010016746A
Publication Date:
May 12, 2011
Filing Date:
January 28, 2010
Export Citation:
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Assignee:
SUN YUEH WAY
International Classes:
B65G49/06; B25J15/06
Domestic Patent References:
JPH1076490A1998-03-24
JPH09216186A1997-08-19
JPH10249771A1998-09-22
JPS5015957A1975-02-20
JPH07206211A1995-08-08
JP2007210774A2007-08-23
JP2009146932A2009-07-02
JP2009040518A2009-02-26
Attorney, Agent or Firm:
Sakuo Yamaguchi



 
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