Title:
SUBSTRATE SUPPORT MECHANISM OF CONVEYANCE TRUCK
Document Type and Number:
Japanese Patent JP3962574
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate support mechanism of a conveyance truck that can effectively prevent thermal deformation warpage in a post due to radiant heat.
SOLUTION: The substrate support mechanism of a conveyance truck is equipped with a plurality of posts that are slantingly erected on the truck for conveying a substrate to a vacuum treatment chamber and receive the weight of the slanted substrate, and retention nibs are mounted to each post and other members and restrict one portion of the side edge of the substrate for retaining the substrate. A support 7 has a lacked section 7c for preventing a bend due to thermal deformation at a side for receiving thermal energy in the vacuum treatment chamber.
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Inventors:
Naoyuki Miyazono
Yoichiro Nakajima
Eiichiro Otsubo
Eishiro Sasakawa
Yoichiro Nakajima
Eiichiro Otsubo
Eishiro Sasakawa
Application Number:
JP2001335804A
Publication Date:
August 22, 2007
Filing Date:
October 31, 2001
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
B61D27/00; H01L21/677; C23C16/44; H01L21/68; (IPC1-7): H01L21/68; B61D27/00; C23C16/44
Domestic Patent References:
| JP2000177842A | ||||
| JP10017071A | ||||
| JP10199776A | ||||
| JP2001057162A | ||||
| JP59041848A | ||||
| JP2000311934A |
Attorney, Agent or Firm:
Minoru Kudo
Keisaku Nakao
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Tetsuya Kazama
Keisaku Nakao
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Tetsuya Kazama