Title:
二重温度帯を有する静電チャックをもつ基板支持体
Document Type and Number:
Japanese Patent JP5183092
Kind Code:
B2
Inventors:
Alexander Mathuchkin
Dennis couso
Theodoros Panago Paulus
John Holland
Dennis couso
Theodoros Panago Paulus
John Holland
Application Number:
JP2007119297A
Publication Date:
April 17, 2013
Filing Date:
April 27, 2007
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP2005191561A | ||||
| JP2004006813A | ||||
| JP2004282047A | ||||
| JP10303286A | ||||
| JP2002076105A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi