To provide a transfer apparatus which allows an easy replacement of transfer rollers installed on transfer shafts.
The transfer apparatus comprises the plurality of transfer shafts 21 so installed that their axis lines may be parallel to each other, the transfer rollers 28 which are formed on each transfer shaft to support the bottom surface of a substrate, bearings 17 which rotatably support one and the other ends of each transfer shaft, and a driving source for driving the rotation of each transfer shaft. Each transfer shaft is divided into an intermediate shaft 25 formed with the transfer rollers and a pair of end shafts 22 supported by the bearings. The intermediate shaft is linked to the end shafts by a bearing member 23 and a coupling member 26 so that it can be disassembled.
HIROSE HARUMICHI
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
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