To provide a substrate transfer apparatus which enables, with a simple structure, protruding support parts provided on a substrate conveyance member to support a substrate.
A first control unit 38 moves a first moving member 22 so that a belt conveyor 16 and a belt conveyor 26 are linearly arranged in plan view. Further, the first control unit 38 controls the rotational drive of the belt conveyor 26 so as to cause the belt conveyor 26 to receive a substrate 12 conveyed by the belt conveyor 16. The first control unit 38 also controls lifters 36 to lift a conveyance pallet 18, thereby causing support parts 20 to support the substrate 12. Consequently, the belt conveyor 26 and the substrate 12 are separated (spaced apart) from each other. As described above, the substrate 12 can be supported by (placed on) the support parts 20 provided on the conveyance pallet 18, with a simple structure in which the lifters 36 lift the conveyance pallet 18.
| JPH0352297 | APPARATUS FOR MANUFACTURING SEMICONDUCTOR |
| JP5937470 | Part feeder |
NONOYAMA HIROSHI
CHO TOMOAKI
YOSHIDA YOSHITAKA
加藤 和詳
福田 浩志