PURPOSE: To shorten the width determining time of a transport station by arranging a transfer guide which shifts in the direction perpendicular to the substrate transport direction and is attached with or separated from on guide member between a pair of substrate guide members.

CONSTITUTION: When a transfer guide member 4 is far by a distance L1 from a guide member 3, and it is necessary to change the distance to a distance L2 from the guide member 3 for the transportation of the next substrate, a controller 11 determines either a guide part 2 or 3 as standard according to the both positions L1 and L2 and the max. and min. transfer distance of the transfer guide member 4, and the transfer amount of the transfer guide 4 for the determined guide member 2 or 3 is calculated, and the transfer guide 4 is shifted until it contacts with the limit switch 13 or 14 of the guide as standard by revolving a motor 10 in the prescribed normal or the reverse direction. Then, the transfer guide 4 is shifted by a prescribed amount by reversely revolv ing the motor 10. With such constitution, the width determining time can be shortened.