SUBSTRATE CONVEYANCE DEVICE AND DEPOSITION DEVICE

Title:

SUBSTRATE CONVEYANCE DEVICE AND DEPOSITION DEVICE

Document Type and Number:

Japanese Patent JP2023061274

Kind Code:

A

Abstract:

To provide a technique for accurately acquiring an edge image of a substrate in a substrate conveyance device.SOLUTION: The substrate conveyance device includes substrate conveyance means for conveying a substrate, photographing means for photographing an edge image of the substrate using illumination light from a light source in aligning the substrate to the conveyance means, adjusting means for adjusting at least one of a shutter speed of the photographing means, a gain of the photographing means, and an amount of light of the illumination light when a failure is caused in photographing the edge image of the substrate, and alignment means for performing an alignment on the basis of the edge image of the substrate photographed while the adjustment is made.SELECTED DRAWING: Figure 10

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