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Title:
SUBSTRATE TRANSFER DEVICE
Document Type and Number:
Japanese Patent JP2011026093
Kind Code:
A
Abstract:

To provide a device for solving such a problem that unreasonable force works on a substrate when clamped.

The substrate transfer device 4 includes a substrate guide means for guiding the substrate O such as a large glass substrate to be freely moved in an in-plane direction while accurately holding its holding height, and a substrate driving means for moving the substrate held by the substrate guide means in a specified in-plane direction, the substrate driving means including a plurality of clamp parts for clamping the substrate such as the large glass substrate, and a substrate driving part for driving the clamp parts in synchronization to move the substrate being held by the substrate guide means in the specified direction and position it, wherein an escaping mechanism 59 is further provided for escaping the clamping parts 21 in the out-of-plane direction of the substrate O to avoid unreasonable force from working on the substrate O when clamped by the clamping parts 21.


Inventors:
SUZUKI MASAMI
NISHI NORIO
MATSUMOTO JUNICHI
Application Number:
JP2009175776A
Publication Date:
February 10, 2011
Filing Date:
July 28, 2009
Export Citation:
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Assignee:
KATAOKA SEISAKUSHO KK
International Classes:
B65G49/06; B23K26/08; B23K26/10; C03B33/09; C03B35/00; H01L21/677
Domestic Patent References:
JP2005244155A2005-09-08
JPH07157133A1995-06-20
JP2009098052A2009-05-07
Foreign References:
WO2009075137A12009-06-18
Attorney, Agent or Firm:
Kazuhiro Akazawa
Takeshi Miyazawa



 
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