Title:
基板の搬送装置
Document Type and Number:
Japanese Patent JP4448575
Kind Code:
B2
Inventors:
Hiroyuki Tono
Application Number:
JP23159399A
Publication Date:
April 14, 2010
Filing Date:
August 18, 1999
Export Citation:
Assignee:
Furnace Co., Ltd.
International Classes:
B05C13/02; B05D3/02; B05C9/14; B65G25/02; B65G49/05; B66C1/48; F26B15/12
Domestic Patent References:
| JP63013914U | ||||
| JP63259381A | ||||
| JP60190722U |
Attorney, Agent or Firm:
Takeji Nara