Title:
基板の搬送装置
Document Type and Number:
Japanese Patent JP4490148
Kind Code:
B2
Inventors:
Katsuhiko Katashima
Application Number:
JP2004086791A
Publication Date:
June 23, 2010
Filing Date:
March 24, 2004
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B65G13/00; B65G49/06; B65G13/06; B65G39/04; H01L21/677; H01L21/68
Domestic Patent References:
| JP6059794U | ||||
| JP5301084A | ||||
| JP10029709A | ||||
| JP7237746A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto