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Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP5524388
Kind Code:
B1
Inventors:
Hideki Sato
Application Number:
JP2013097495A
Publication Date:
June 18, 2014
Filing Date:
May 07, 2013
Export Citation:
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Assignee:
Fuji Kiko Co., Ltd.
International Classes:
B65G49/06; B65G13/00; H01L21/677
Domestic Patent References:
JP2011116523A2011-06-16
JPH09129702A1997-05-16
JP2011504862A2011-02-17
JPH0297309U1990-08-02
JP2010222063A2010-10-07
JPH05309345A1993-11-22
JP2000233319A2000-08-29
JP2004105846A2004-04-08
JP2011116523A2011-06-16
JPH09129702A1997-05-16
JP2011504862A2011-02-17
JPH0297309U1990-08-02
Attorney, Agent or Firm:
Takumi Kubota



 
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