Title:
Substrate transport device
Document Type and Number:
Japanese Patent JP5938194
Kind Code:
B2
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Inventors:
Daisuke Sado
Shinji Kamiya
Shinji Kamiya
Application Number:
JP2011248109A
Publication Date:
June 22, 2016
Filing Date:
November 11, 2011
Export Citation:
Assignee:
Daihen Co., Ltd.
International Classes:
H01L21/677; B65G49/06
Domestic Patent References:
| JP10236636A | ||||
| JP2004090186A | ||||
| JP2005045122A | ||||
| JP2002302248A |
Foreign References:
| WO2011132332A1 |
Attorney, Agent or Firm:
Juichiro Yano