SUBSTRATE TREATMENT DEVICE - DAINIPPON SCREEN MFG

Title:

SUBSTRATE TREATMENT DEVICE

Document Type and Number:

Japanese Patent JP2007192245

Kind Code:

A

Abstract:

To provide a substrate treatment device capable of preventing the erroneous connection of piping by enabling visual identification.

Nuts 42 connecting injection tubes 34-36 and first-third injection part 31-33, respectively, are colored for identification. For example, the nut of the injection tube for a sulfuric acid is colored in a "blue base", the nut of the injection tube for a hydrogen peroxide solution in a "yellow base" and the nut of the injection tube for fluid that is extremely dangerous when mixed with an acid such as an organic solvent in a "red base". Accordingly, it is possible to prevent the erroneous connection of the piping by allowing a worker to easily identify the injection tubes 34-36 from each other while visually seeing each color of the nuts 42.

Inventors:

MAEKAWA NAOTADA

Application Number:

JP2006008476A

Publication Date:

August 02, 2007

Filing Date:

January 17, 2006

Export Citation:

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Assignee:

DAINIPPON SCREEN MFG

International Classes:

F16L1/00; F16L39/00; H01L21/027; H01L21/304; H01L21/306

Attorney, Agent or Firm:

Tsutomu Sugiya

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