Title:
スルホネート化合物、光酸発生剤及びフォトリソグラフィー用樹脂組成物
Document Type and Number:
Japanese Patent JP6622210
Kind Code:
B2
Abstract:
Provided are: a non-ionic photoacid generator containing a sulfonate compound having a high photosensitivity to i lines, exhibiting excellent heat-resistance stability, and exhibiting excellent solubility in a hydrophobic material; and a resin composition for photolithography containing the same. The present invention is a sulfonate compound characterized by being represented by general formula (1). [In formula (1), R1 represents an aryl group having 6 to 18 carbon atoms or a heterocyclic hydrocarbon group having 4 to 20 carbon atoms. R2 represents a hydrogen atom, an alkyl group having 1 to 18 carbon atoms, an alkenyl group having 2 to 18 carbon atoms, an alkynyl group having 2 to 18 carbon atoms, or an aryl group having 6 to 18 carbon atoms. R3 represents a hydrocarbon group having 1 to 18 carbon atoms (in which some or all hydrogen atoms may be substituted with fluorine).]
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Inventors:
Masaaki Oka
Nakamura Yuji
Nakamura Yuji
Application Number:
JP2016557445A
Publication Date:
December 18, 2019
Filing Date:
October 13, 2015
Export Citation:
Assignee:
Sun Appro Co., Ltd.
International Classes:
C07C309/65; C07C309/66; C07C309/73; C07D311/16; C09K3/00; G03F7/004; G03F7/038
Domestic Patent References:
| JP1293339A | ||||
| JP11038630A | ||||
| JP10228109A | ||||
| JP10016423A | ||||
| JP9185160A | ||||
| JP9239945A | ||||
| JP2100055A | ||||
| JP2007031351A |
Foreign References:
| US4371605 |
Other References:
OKAWARA,T. et al.,Convenient syntheses of 1-acyl-2-alkylhydrazines,Synthesis,1987年,No.2,p.183-4,(特に、第183頁化合物5)
MISRA,B.N. et al,Tosylation of N-acyl-O-alkylhydroxylamines: Part III. Synthesis of tosyl O-alkyl-arylcarbohydroxam,Indian Journal of Chemistry, Section B: Organic Including Medicinal,1977年,Vol.15, No.1,p.49-50,(特に、第49頁化合物(I))
HOFFMAN,R.V. et al.,Generation of N-acyliminium ions from ionization-rearrangement reactions of N-triflyloxy amides,Tetrahedron Letters,1994年,Vol.35, No.20,p.3231-4,(特に第3232頁の化合物8e,8f,第3233頁8e,8l)
HOFFMAN,R.V. et al.,A Facile Preparation of N-(Isopropoxyalkyl) Amides by Generation and Trapping of N-Acyliminium Ions,Journal of Organic Chemistry,1994年,Vol.59, No.13,p.3530-9,(特に、第3532頁の化合物11g,11h,11i,11o)
GESSNER,U. et al.,Internal Mobility in the ion pairs during aromatic rearrangement of O-sulfonyl-N-phenylhydroxylamine,Chemische Berichte,1982年,Vol.115, No.8,p.2865-71,(特に、第2865頁の化合物3)
KALUZA,F. et al.,The Light catalyzed hydrolytic reactions of 2,4-dinitrobenzenesulphenyl chloride with a note on the,Journal of the South African Chemical Institute,1960年,Vol.13, 89-96,p.13, 89-96,(特に、第95頁のTable)
PRZYCHODZEN,W. et al,On the reaction of bis(phosphothioyl)disulfanes with hydroxamic acids, part I: ionic versus radical,Heteroatom Chemistry,2008年,Vol.19, No.3,p.271-282,(特に、第281頁の化合物12)
TRUNOV,S.P. et al.,Rearrangement of N-(phenylsulfoxy)benzamide,Zhurnal Organicheskoi Khimii,1975年,Vol.11, No.5,p.1136-7,(特に、化合物I)
BANKS,M.R. et al.,The reaction of N-alkylhydroxamic acids with sulphinyl chlorides,Journal of the Chemical Society, Perkin Transactions 2: Physical Organic Chemistry(1972-1999),1986年,No.8,p.1211-16,(特に、第1212頁の化合物(IV)、第1213頁のTable1)
Database: ChemSpider (ChemZoo, Inc.),Entered STN: 13 Jun 2008, accession No.1027984-84-4 REGISTRY[online], [retrieved on 2015.12.14], retrieved from: STN
Chemical Library Supplier: Ambinter,Entered STN: 28 Nov 2008, accession No.304645-12-3 REGISTRY[online], [retrieved on 2015.12.14], retrieved from: STN
MISRA,B.N. et al,Tosylation of N-acyl-O-alkylhydroxylamines: Part III. Synthesis of tosyl O-alkyl-arylcarbohydroxam,Indian Journal of Chemistry, Section B: Organic Including Medicinal,1977年,Vol.15, No.1,p.49-50,(特に、第49頁化合物(I))
HOFFMAN,R.V. et al.,Generation of N-acyliminium ions from ionization-rearrangement reactions of N-triflyloxy amides,Tetrahedron Letters,1994年,Vol.35, No.20,p.3231-4,(特に第3232頁の化合物8e,8f,第3233頁8e,8l)
HOFFMAN,R.V. et al.,A Facile Preparation of N-(Isopropoxyalkyl) Amides by Generation and Trapping of N-Acyliminium Ions,Journal of Organic Chemistry,1994年,Vol.59, No.13,p.3530-9,(特に、第3532頁の化合物11g,11h,11i,11o)
GESSNER,U. et al.,Internal Mobility in the ion pairs during aromatic rearrangement of O-sulfonyl-N-phenylhydroxylamine,Chemische Berichte,1982年,Vol.115, No.8,p.2865-71,(特に、第2865頁の化合物3)
KALUZA,F. et al.,The Light catalyzed hydrolytic reactions of 2,4-dinitrobenzenesulphenyl chloride with a note on the,Journal of the South African Chemical Institute,1960年,Vol.13, 89-96,p.13, 89-96,(特に、第95頁のTable)
PRZYCHODZEN,W. et al,On the reaction of bis(phosphothioyl)disulfanes with hydroxamic acids, part I: ionic versus radical,Heteroatom Chemistry,2008年,Vol.19, No.3,p.271-282,(特に、第281頁の化合物12)
TRUNOV,S.P. et al.,Rearrangement of N-(phenylsulfoxy)benzamide,Zhurnal Organicheskoi Khimii,1975年,Vol.11, No.5,p.1136-7,(特に、化合物I)
BANKS,M.R. et al.,The reaction of N-alkylhydroxamic acids with sulphinyl chlorides,Journal of the Chemical Society, Perkin Transactions 2: Physical Organic Chemistry(1972-1999),1986年,No.8,p.1211-16,(特に、第1212頁の化合物(IV)、第1213頁のTable1)
Database: ChemSpider (ChemZoo, Inc.),Entered STN: 13 Jun 2008, accession No.1027984-84-4 REGISTRY[online], [retrieved on 2015.12.14], retrieved from: STN
Chemical Library Supplier: Ambinter,Entered STN: 28 Nov 2008, accession No.304645-12-3 REGISTRY[online], [retrieved on 2015.12.14], retrieved from: STN
Attorney, Agent or Firm:
Hirofumi Hayashi
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