Title:
SULFONIC ACID AND SULFONIC ACID DERIVATIVE
Document Type and Number:
Japanese Patent JP2008189668
Kind Code:
A
Abstract:
To provide sulfonic acid to be generated from a thermosensitive acid-generating agent and its raw material compound.
The raw material compound is represented by general formula (I-a), which is a radiation-sensitive resin composition of positive type and negative type containing the acid-generating agent.
Inventors:
EHATA SATOSHI
YONEDA EIJI
NAGAI TOMOKI
TONERI TATSUYA
O ISAMU
YONEDA EIJI
NAGAI TOMOKI
TONERI TATSUYA
O ISAMU
Application Number:
JP2008013412A
Publication Date:
August 21, 2008
Filing Date:
January 24, 2008
Export Citation:
Assignee:
JSR CORP
International Classes:
C07C309/24; C07C309/81; H01L21/027; C07C
Domestic Patent References:
| JP2004531749A | 2004-10-14 |
Attorney, Agent or Firm:
Toshiaki Fukuzawa