Title:
スルホニウム塩化合物及びそれを含有する感光性樹脂組成物
Document Type and Number:
Japanese Patent JP4168191
Kind Code:
B2
Inventors:
Tomotaka Yamanaka
Masamichi Hayakawa
Yoshiyuki Utsumi
Masamichi Hayakawa
Yoshiyuki Utsumi
Application Number:
JP2002199640A
Publication Date:
October 22, 2008
Filing Date:
July 09, 2002
Export Citation:
Assignee:
Toyo Gosei Co., Ltd.
International Classes:
C07C381/12; G03F7/004; C07C309/06; G03F7/038; G03F7/039; H01L21/027
Domestic Patent References:
| JP5181279A | ||||
| JP11095424A | ||||
| JP8320554A | ||||
| JP3154059A |
Attorney, Agent or Firm:
Hiroyuki Kurihara