Sulfonium salt, a photo-oxide generating agent, a hardenability constituent, and a resist composition

Title:

Sulfonium salt, a photo-oxide generating agent, a hardenability constituent, and a resist composition

Document Type and Number:

Japanese Patent JP6046540

Kind Code:

B2

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Inventors:

Takuya Ikeda
Issei Suzuki
Seiji Yasui
Takeshi Furuta

Application Number:

JP2013079183A

Publication Date:

December 14, 2016

Filing Date:

April 05, 2013

Export Citation:

Assignee:

Sun Appro Co., Ltd.

International Classes:

C07C381/12; C07C309/06; C07C311/09; C07F5/02; C07F9/535; G03F7/004; G03F7/038; G03F7/039

Domestic Patent References:

Attorney, Agent or Firm:

Hirofumi Hayashi

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