Title:
SUPERCONDUCTING THIN FILM ELEMENT
Document Type and Number:
Japanese Patent JP3256645
Kind Code:
B2
Abstract:
PURPOSE: To obtain a superconducting thin film of a constitution, wherein a distribution is given to the resistance of a protective film, whereby the generation of heat in places, which are easily fused, of the protective film is inhibited and fusing of the protective film is hardly generated.
CONSTITUTION: The film thickness of a superconducting thin film 2 is not even, is thick in the center part of the thin film 2 and is thin in the sides of the end parts of the thin film 2. As a result, as the thin film 2 is quickly quenched in the sides of the end parts, a temperature rise is increased in the sides of the end parts of a protective film 3 and the end parts of the film 3 are easily fused compared with the center part of the film 3. However, as the film 3 is constituted in such a way that the thickness of the film 3 becomes thick on the sides of the end parts, the generation of heat in the sides of the end parts of the film 3 is inhibited. As a result, fusing of the film 3 on the sides of the end parts of the film 3 can be inhibited.
Inventors:
Teijiro Mori
Tatsuya Hayashi
Shigeru Matsuno
Toshio Umemura
Hideoki Uchikawa
Tatsuya Hayashi
Shigeru Matsuno
Toshio Umemura
Hideoki Uchikawa
Application Number:
JP12675995A
Publication Date:
February 12, 2002
Filing Date:
May 25, 1995
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L39/16; (IPC1-7): H01L39/16
Domestic Patent References:
| JP653559A | ||||
| JP5226706A | ||||
| JP5251757A | ||||
| JP5251761A | ||||
| JP265202A |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)
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