Title:
研磨スラリーに気体を添加する供給系及びこの方法
Document Type and Number:
Japanese Patent JP5721245
Kind Code:
B2
Inventors:
Chen Sho Akira
Shin Zhou
Du Weigang
Shin Zhou
Du Weigang
Application Number:
JP2014084617A
Publication Date:
May 20, 2015
Filing Date:
April 16, 2014
Export Citation:
Assignee:
National Taiwan Science and Technology University
International Classes:
B24B37/00; B24B57/02; C09K3/14; H01L21/304
Domestic Patent References:
| JP2000277467A | ||||
| JP63039767A | ||||
| JP2002170792A | ||||
| JP2013043239A | ||||
| JP2000340532A | ||||
| JP2003251555A |
Attorney, Agent or Firm:
Hiroyuki Kurihara