Title:
SUPPORT SHEET, COMPOSITE SHEET FOR PROTECTIVE FILM FORMATION, AND METHOD FOR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP2022143454
Kind Code:
A
Abstract:
To provide a support sheet capable of achieving both poor feeding of a sheet and recognizability of laser marking when observed through a base material, a protective film forming composite sheet including the support sheet and a protective film forming film, and a method for manufacturing an apparatus such as a semiconductor apparatus.SOLUTION: A support sheet includes a base material and an adhesive layer formed on one main surface of the base material, and in the base material, a rectangular area of 4.91 mm×4.90 mm on the main surface on which the adhesive layer is not formed has an arithmetic mean height Sa1 of more than 0.50 μm and a gloss value of 20 or more at an incident angle of 60° on the main surface on which the adhesive layer is not formed. Moreover, a protective film forming composite sheet is provided with this support sheet and a protective film forming film.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMOTO DAISUKE
Application Number:
JP2021043959A
Publication Date:
October 03, 2022
Filing Date:
March 17, 2021
Export Citation:
Assignee:
LINTEC CORP
International Classes:
H01L21/301; B23K26/00; B32B27/00; C09J7/20; C09J7/38; C09J201/00; H01L23/00
Attorney, Agent or Firm:
Maeda Suzuki International Patent Attorneys Corporation