Title:
SUPPORTING DEVICE AND STAGE DEVICE, AND EXPOSURE SYSTEM
Document Type and Number:
Japanese Patent JP2004200218
Kind Code:
A
Abstract:
To impart thrust without generating distortion to a surface plate, and to contribute to space saving.
A gas chamber 30 driving a body 6 in a first direction by gas and a driving device 31 driving the body 6 in the first direction by an electro-magnetic force are mounted. The gas chamber 30 has a first moving section 63 supporting the body 6 and being freely moved in the first direction, and a second moving section 65 integrally moved in an opposed state relative to the first moving section 63 by the driving device 31.
Inventors:
YAMAMOTO KOJI
Application Number:
JP2002363612A
Publication Date:
July 15, 2004
Filing Date:
December 16, 2002
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; G03F7/20; H01L21/68
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi