支持ガラス基板及びこれを用いた積層基板

Title:

支持ガラス基板及びこれを用いた積層基板

Document Type and Number:

Japanese Patent JP7276644

Kind Code:

B2

Abstract:

The present invention provides a support glass substrate for supporting a pre-singulation substrate, characterized in that the support glass substrate comprises an information identification section having dots as constituent units on the surface of the support glass substrate and in that the mean length of cracks extending from each of the dots in the surface direction is no greater than 350 mu m.

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Inventors:

Ryota Suzuki

Application Number:

JP2018061106A

Publication Date:

May 18, 2023

Filing Date:

March 28, 2018

Export Citation:

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Assignee:

Nippon Electric Glass Co., Ltd.

International Classes:

H01L21/02; C03C23/00

Domestic Patent References:

JP9278494A
JP2000223382A
JP2016160135A

Foreign References:

WO2016136348A1

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