Title:
弾性表面波デバイス
Document Type and Number:
Japanese Patent JP5652343
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an SAW (surface acoustic wave) device in which desired frequency characteristics of first and second propagation path can be obtained by applying frequency characteristic adjustment method simultaneously to both areas where first and second propagation paths are formed.SOLUTION: The SAW device includes a crystal orientation adjustment layer 13 formed on a part of an upper surface 11a of a substrate 11; piezoelectric thin films 12 formed on a formation area of the crystal orientation adjustment layer 13 on the upper surface 11a of the substrate 11 and a non-formation area of the same and formed with a same material; and first and second propagation paths formed on one of the top and bottom surfaces of the piezoelectric thin films 12 at different positions. Among the piezoelectric films 12, a first area 12c arranged on the formation area of the crystal orientation adjustment layer 13, and a second area 12d arranged on the non-formation area of the crystal orientation adjustment layer 13 have different crystal orientations. Respective area ratios of the first and second propagation paths to the first and second areas 12c and 12d are different.
Inventors:
中村 拓也
Application Number:
JP2011140708A
Publication Date:
January 14, 2015
Filing Date:
June 24, 2011
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H03H9/145; H01L41/09; H01L41/18; H01L41/22; H01L41/39; H03B5/30; H03H3/08; H03H9/25; H03H9/64
Attorney, Agent or Firm:
Patent business corporation ゆうあい patent firm