SURFACE ACOUSTIC WAVE ELEMENT AND ANALYZING METHOD USING SURFACE ACOUSTIC WAVE ELEMENT

Title:

SURFACE ACOUSTIC WAVE ELEMENT AND ANALYZING METHOD USING SURFACE ACOUSTIC WAVE ELEMENT

Document Type and Number:

Japanese Patent JP2003115744

Kind Code:

A

Abstract:

To provide a surface acoustic wave element for realizing the large number of circulations of a surface acoustic wave (SAW) and an analyzing method using the SAW.

A spherical base material 110 is formed of a crystal, and is held in a recessed portion 122 of a base plate 121. Comb-shaped electrodes 123 connected to a transmitter 126 are formed on the portion 122. A thin resin film is formed on the surface of the material 110, and the material 110 faces the electrodes 123 with spacing. The electrodes 123 excite an SAW propagating along an annular surface 111.

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Inventors:

NAKASO NOBUTAKA
TSUKAHARA YUSUKE
YAMANAKA ICHIJI

Application Number:

JP2001311789A

Publication Date:

April 18, 2003

Filing Date:

October 09, 2001

Export Citation:

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Assignee:

TOPPAN PRINTING CO LTD
YAMANAKA ICHIJI

International Classes:

H01L41/09; G01N29/02; H01L41/18; H03H9/145; (IPC1-7): H03H9/145; H01L41/09; H01L41/18

Attorney, Agent or Firm:

Takehiko Suzue (5 outside)

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