Title:
SURFACE ACOUSTIC WAVE ELEMENT AND PRODUCTION METHOD THEREFOR
Document Type and Number:
Japanese Patent JP3874967
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve yield and reliability by utilizing material, which is hard for both a surface conductive film and a backside conductive film to cause battery reaction, for the films.
SOLUTION: Conductive films which are mutually conducted are formed on a back side and a front side of a substrate. A surface conductive film is patterned into a specified shape and has a function for converting an electric signal and elastic vibration. A backside conductive film has a function for releasing a charge originated from a pyroelectric effect of a piezoelectric material in patterning. As material constituting the surface conductive film, Al or an alloy of the Al and Mg, Cu, Mn and the like. The backside conductive film consists of a metal which has a standard electrode potential smaller than that of Cr except Al or its alloy but, to be more concrete, Li, K, Na, Ca, Mg, Be, Ti, Mn, V, Nb, Zn and the like are listed. The surface conductive film and the backside conductive film may consist of the same material and an alloy of Al and other metal of more than 2 weight percentage.
Inventors:
Tokihiro Nishihara
Osamu Igata
Osamu Igata
Application Number:
JP16387499A
Publication Date:
January 31, 2007
Filing Date:
June 10, 1999
Export Citation:
Assignee:
富士通株式会社
富士通メディアデバイス株式会社
富士通メディアデバイス株式会社
International Classes:
H03H3/08; H03H9/145; (IPC1-7): H03H3/08; H03H9/145
Domestic Patent References:
| JP9036687A | ||||
| JP6160926A |
Attorney, Agent or Firm:
Shintaro Nogawa
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