PURPOSE: To reduce the exhaust time for measurement preparations and achieve the simplification and compactness of a mechanism by partitioning and arranging a measuring instrument chamber and a sample chamber at the lower side and setting the measuring instrument, a gate partition valve, and a sample on the same shaft.

CONSTITUTION: A measuring instrument chamber 1 in which a measuring instrument 2 is provided and a sample chamber 4 in which a sample A is taken in and out from the outside are partitioned by a gate partition valve 3. In addition, the surface analyzing apparatus is provided with a sample bench 5 as a turntable 51 on which an external sample A is loaded and that turns this sample A up to the same vertical line as the measuring instrument 2 and a sample moving section 6 with an elevating cylinder 61 that makes the sample A approach to the measuring instrument 2. As a result, only the sample chamber can be exhausted and the time required for exhaust can sharply be reduced. Also, the moving accuracy of the sample can be improved and the simplification and compactness of a mechanism can be achieved.