Title:
表面検査装置
Document Type and Number:
Japanese Patent JP3591160
Kind Code:
B2
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| JPH02168378 | PHOTOELECTRIC CONVERTER |
Inventors:
Akira Kazama
Yuji Matoba
Tsutomu Kawamura
Takahiko Oshige
Yuji Matoba
Tsutomu Kawamura
Takahiko Oshige
Application Number:
JP28458096A
Publication Date:
November 17, 2004
Filing Date:
October 08, 1996
Export Citation:
Assignee:
jfe Steel Corporation
International Classes:
G01N21/89; G01N21/21; G01N21/892; (IPC1-7): G01N21/892; G01N21/21
Domestic Patent References:
| JP7294455A | ||||
| JP62293104A | ||||
| JP4294227A | ||||
| JP6180282A |
Attorney, Agent or Firm:
Toshiro Kojima