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Title:
SURFACE MODIFIER FOR CERAMIC
Document Type and Number:
Japanese Patent JP2000281470
Kind Code:
A
Abstract:

To obtain a surface modifier for ceramic composed of a composition capable of properly adjusting the rate of chemical reaction of an etching solution selected for surface modification to be applied to ceramic or a ceramic composite material, actualizing stable etching and controlling increase in the amount of energy resources used.

This surface modifier for ceramic comprises a solution composed of an etching solution which is constituted of a solution containing an oxidizing agent, a solution containing an oxidizing agent and an acid or a solution containing an oxidizing agent, an acid and an alkali selected corresponding to the purpose of surface modification and a chelating agent. Etching is carried out by scavenging a cation generated in the etching to improve the efficiency of the surface modification and to enable various controls of modification.


Inventors:
FUJII HIROMITSU
NAKAMURA KATSUHIRO
NAMEKATA TAKEHIKO
YOKOUCHI SHIN
Application Number:
JP9477599A
Publication Date:
October 10, 2000
Filing Date:
April 01, 1999
Export Citation:
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Assignee:
SUMITOMO SPEC METALS
International Classes:
H01L41/39; C04B41/53; C04B41/91; H01L41/332; (IPC1-7): C04B41/91; H01L41/24
Attorney, Agent or Firm:
Shigenobu Ikejo (2 others)