Title:
SURFACE MODIFYING METHOD AND SURFACE MODIFYING DEVICE
Document Type and Number:
Japanese Patent JP3726423
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a surface modifying method capable of easily executing surface modification even in the case the object to be subjected to surface modification is the one in which trouble shall be caused when its shape is changed by executing surface modification and to provide a surface modifying device.
SOLUTION: At the time of introducing a surface modifying material 14 contg. elements different from those composing a substrate 12 into the surface of the substrate and modifying the surface of the substrate, the gasified surface modifying material is converted into plasma to form a plasma region 19, and after that, the ionized surface modifying material present in the plasma region 19 is drawn out from the plasma region 19 and is applied to the surface of the substrate. In this way, only the ionized surface modifying material 110 acceleratable by the electric field is accelerated and is able to irradiate the vicinity of the surface of the substrate 12, so that the characteristics of the substrate can be modified without forming thin coating of the surface modifying material.
Inventors:
Takashi Hirao
Minoru Sato
Kazuyasu Adachi
Minoru Sato
Kazuyasu Adachi
Application Number:
JP13639397A
Publication Date:
December 14, 2005
Filing Date:
May 27, 1997
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
C23C14/32; C23C16/50; (IPC1-7): C23C14/32; C23C16/50
Domestic Patent References:
| JP5078840A | ||||
| JP8222177A | ||||
| JP8227687A | ||||
| JP61121240A |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano