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Title:
SURFACE OXIDATION CARBIDE FIELD EMITTER
Document Type and Number:
Japanese Patent JPS5971232
Kind Code:
A
Abstract:

PURPOSE: To focus an emitted electron beam into a uniform electron beam and obtain high intensity by oxidizing the surface of a field emitter made of a single crystal of transition metal carbide monocrystal.

CONSTITUTION: A field emitter made of a single crystal of transition metal carbide is flash-heated to a high temperature in an extremely high vacuum to form a clean surface. Next, a sufficient quantity of oxygen gas is introduced to be saturation-absorbed on the emitter surface, which is then flash-heated to a required temperature in an extremely high vacuum. By using the field emitter made of surface oxidized transition metal carbide thus obtained, an electron beam is focused at its center portion, and the electron beam is highly intensified caused by the focusing of the electron beam and an increase of the current density due to a reduction of the work function.


Inventors:
ISHIZAWA YOSHIO
OOSHIMA CHIYUUHEI
OOTANI SHIGEKI
SHIBATA YUKIO
Application Number:
JP18050082A
Publication Date:
April 21, 1984
Filing Date:
October 14, 1982
Export Citation:
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Assignee:
KAGAKU GIJUTSUCHO MUKIZAI
International Classes:
H01J1/30; C30B29/36; H01J1/304; H01J9/02; (IPC1-7): C30B29/36; H01J1/14
Domestic Patent References:
JPS559775A1980-01-23
JPS5661733A1981-05-27