To provide a surface polishing apparatus which carries out automatic groove cleaning during polishing work without dangerous work of the operator in order to carry out groove cleaning of a surface plate or without provision of a large-scale device, and exerts a cooling effect that prevents deformation of the surface plate due to machining heat without interrupting the polishing work.
According to the surface polishing apparatus which carries out automatic cleaning of the groove in the surface plate, by adding a simple device 16 for blowing air from the surface plate 6, to the polishing apparatus, dangerous work of the operator is omitted, and cleaning of the groove in the surface plate is carried out during the polishing work without interrupting the same. At the same time a cooling effect that prevents deformation of the surface plate due to machining heat, can be brought about, which leads to improved polishing accuracy and improved production efficiency. Thus the following problems are solved. That is, (1) cleaning of the grooves in the upper and lower surface plates in order to solve yield degradation due to scars of workpieces to be surface-polished, has been conventionally carried out through the dangerous work of the operator, i.e. by inserting the hand or the body under the hung upper surface plate, or by providing the large-scale device such as an automatic surface plate cleaning device. Generally the cleaning work has been carried out by interrupting the work of the surface polishing apparatus, which poses degraded production efficiency. Further (2) to prevent deformation of the surface plate due to machining heat, use of low thermal expansion material or provision of the surface plate cooling device has been indispensable.
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SAITO SHOJI
SUZUKI JUNPEI