Title:
Surface protection sheet
Document Type and Number:
Japanese Patent JP6059499
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a surface protective sheet suitably used in the back grinding process of a work having a modified region formed therein, and preventing contamination of the protected surface of a work, by suppressing ingress of water from a gap, formed when the work is fractured, onto the protected surface of the work during the back grinding process of the work.SOLUTION: A surface protective sheet having an adhesive layer on a base material satisfies following requirements (a)-(d). (a) Young's modulus of the base material is 450 MPa or more. (b) Storage modulus of the adhesive layer at 25°C is 0.10 MPa or more. (c) Storage modulus of the adhesive layer at 50°C is 0.20 MPa or less. (d) Thickness of the adhesive layer is 30 μm or more.
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Inventors:
Yuki Eto
Akinori Sato
Akinori Sato
Application Number:
JP2012223655A
Publication Date:
January 11, 2017
Filing Date:
October 05, 2012
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/304; C09J7/02; C09J201/00; H01L21/301
Domestic Patent References:
| JP2006012998A | ||||
| JP2010129701A | ||||
| JP2011142253A | ||||
| JP2006286808A | ||||
| JP2009224375A | ||||
| JP2008004836A | ||||
| JP2005343997A |
Foreign References:
| WO2008047610A1 |
Attorney, Agent or Firm:
Tamotsu Otani
Makoto Kataoka
Toshihide Ishihara
Makoto Kataoka
Toshihide Ishihara