Title:
表面処理用組成物及び表面処理方法
Document Type and Number:
Japanese Patent JP2021534570
Kind Code:
A
Abstract:
本開示は、ウエハの表面上に配したパターン形成されたウエハを処理する方法及び組成物に関わる。
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Inventors:
Voitzchuck, William A.
Kazutaka Takahashi
Atsushi Mizutani
Park, Kyon
Kazutaka Takahashi
Atsushi Mizutani
Park, Kyon
Application Number:
JP2021505745A
Publication Date:
December 09, 2021
Filing Date:
July 29, 2019
Export Citation:
Assignee:
Fujifilm Electronic Materials U.S.A., Inc.
International Classes:
H01L21/304; C11D7/06; C11D7/08; C11D7/18; C11D7/26; C11D7/50; C11D17/08; G03F7/38; H01L21/027
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Kato Kazunori