Title:
表面処理装置及び表面処理方法
Document Type and Number:
Japanese Patent JP4103565
Kind Code:
B2
Inventors:
Tetsuji Shibata
Noriyuki Taguchi
Keiichi Yamazaki
Yasushi Sawada
Noriyuki Taguchi
Keiichi Yamazaki
Yasushi Sawada
Application Number:
JP2002349059A
Publication Date:
June 18, 2008
Filing Date:
November 29, 2002
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
B08B7/00; H05H1/24; B01J19/08; B01J19/10; B08B3/12; C23F4/00; H01L21/3065
Domestic Patent References:
| JP11335869A | ||||
| JP2002316112A | ||||
| JP8148436A |
Attorney, Agent or Firm:
Keisei Nishikawa
Atsuo Mori
Atsuo Mori