Title:
SURFACE TREATMENT METHOD, PLATING TREATED PART, AND ALIGNER
Document Type and Number:
Japanese Patent JP2003306798
Kind Code:
A
Abstract:
To provide a surface treatment method by which the formation of cloudy substances can be suppressed.
The method includes a plating treatment stage S1 wherein the surface of the member as the object for treatment is subjected to black chromium plating treatment, and a cleaning stage S5 wherein the member as the object for treatment subjected to the black chromium plating treatment is subjected to hot water washing. The hot water washing time is set on the basis of the amount of prescribed ions remaining in the member as the object for treatment accompanied by the black chromium plating treatment.
Inventors:
MATSUURA KEIJI
SHOJI KIYOSHI
SHOJI KIYOSHI
Application Number:
JP2002116637A
Publication Date:
October 31, 2003
Filing Date:
April 18, 2002
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; C25D5/50; C25D7/00; C25D21/08; H01L21/027; (IPC1-7): C25D21/08; C25D5/50; C25D7/00; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga (3 outside)