Title:
表面処理方法
Document Type and Number:
Japanese Patent JP4492503
Kind Code:
B2
Inventors:
Eiji Nishioka
Atsushi Watanabe
Atsushi Watanabe
Application Number:
JP2005269369A
Publication Date:
June 30, 2010
Filing Date:
September 16, 2005
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
C23C26/00; F01D5/28
Domestic Patent References:
| JP2004351471A | ||||
| JP2004358547A | ||||
| JP2005002392A | ||||
| JP3180479A |
Foreign References:
| WO2004111303A1 |
Attorney, Agent or Firm:
Manabu Inoue