Title:
スイッチ装置、試験装置、スイッチ方法、および製造方法
Document Type and Number:
Japanese Patent JP5466579
Kind Code:
B2
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| JP2011173185 | MEMS DEVICE |
Inventors:
Yoshihiro Sato
Yoshikazu Abe
Takashi Watanabe
Yoshikazu Abe
Takashi Watanabe
Application Number:
JP2010122334A
Publication Date:
April 09, 2014
Filing Date:
May 28, 2010
Export Citation:
Assignee:
Advantest Corporation
International Classes:
H01H1/04; H01H11/04; H01H37/52; H01H55/00; H01H57/00; H01H59/00
Domestic Patent References:
| JP56064634U |
Foreign References:
| WO2007083769A1 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation