Title:
SWITCHING DEVICE AND TEST DEVICE
Document Type and Number:
Japanese Patent JP2012119596
Kind Code:
A
Abstract:
To provide a switching device in which warpage of a piezoelectric actuator is minimized.
The switching device 100 comprises a contact part 120 provided with first contacts 122a, 122b, and an actuator 130 which moves a second contact 134 to touch the first contacts 122a, 122b or separate therefrom. The actuator 130 has a first piezoelectric film 136 which expands or contracts according to a drive voltage and changes warpage of the actuator 130, and a second piezoelectric film 138 provided in parallel with the first piezoelectric film 136 and minimizes warpage of the actuator 130 while the drive voltage is not applied to the first piezoelectric film 136.
Inventors:
HORI HISAO
ABE SACHIKAZU
SATO YOSHIHIRO
ABE SACHIKAZU
SATO YOSHIHIRO
Application Number:
JP2010269964A
Publication Date:
June 21, 2012
Filing Date:
December 03, 2010
Export Citation:
Assignee:
ADVANTEST CORP
International Classes:
H01L41/09; G01R31/28; H01H49/00; H01H57/00; H01L41/18; H01L41/22; H01L41/43
Attorney, Agent or Firm:
Longhua International Patent Service Corporation
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